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Direct laser interference (DLIP) yakasanganiswa nelaser-induced periodic surface structure (LIPSS) inobvumira kugadzirwa kwenzvimbo dzinoshanda dzezvinhu zvakasiyana.The throughput of the process inowanzowedzerwa nekushandisa yakakwira avhareji laser simba.Zvisinei, izvi zvinotungamirira kuunganidzwa kwekupisa, izvo zvinokanganisa kushata uye chimiro chemugumisiro wepamusoro wepamusoro.Naizvozvo, zvinodikanwa kuti udzidze zvakadzama maitiro eiyo substrate tembiricha pane morphology yezvinhu zvakagadzirwa.Muchidzidzo ichi, nzvimbo yesimbi yakanga yakarongedzwa-mutsara ne ps-DLIP pa532 nm.Kuongorora mhedzisiro yekushisa kwe substrate pane yakakonzerwa netopography, ndiro yekudziya yakashandiswa kudzora tembiricha.Kupisa kusvika ku250 \ (^{\ circ }\) С kwakakonzera kuderera kukuru mukudzika kwezvivakwa zvakaumbwa kubva ku2.33 kusvika 1.06 µm.Kuderera kwacho kwakabatana nekuonekwa kwemhando dzakasiyana dzeLIPSS zvichienderana nekutarisa kweiyo substrate tsanga uye laser-induced surface oxidation.Ichi chidzidzo chinoratidza simba rakasimba reiyo substrate tembiricha, inotarisirwa zvakare kana kurapwa kwepamusoro kuchiitwa paavhareji simba re laser kugadzira kupisa kuunganidza mhedzisiro.
Nzira dzekurapa dzepamusoro dzakavakirwa pane ultrashort pulse laser irradiation dziri pamberi pesainzi uye indasitiri nekuda kwekugona kwavo kuvandudza zvimiro zvepasi zvezvakakosha zvakakosha zvinhu1.Kunyanya, laser-induced custom surface performance is state-of-the-art pane dzakasiyana siyana dzemaindasitiri zvikamu uye mamiriro ekushandisa1,2,3.Somuenzaniso, Vercillo et al.Anti-icing zvivakwa zvakaratidzwa pane titanium alloys yeaerospace application yakavakirwa laser-induced superhydrophobicity.Epperlein et al vakashuma kuti nanosized maficha anogadzirwa nelaser surface structuring anogona kukanganisa biofilm kukura kana kuvharidzira pane zvienzaniso zvesimbi5.Mukuwedzera, Guai et al.yakavandudzawo maoptical properties ye organic solar cells.6 Saka, kuumbwa kwelaser kunobvumira kugadzirwa kwepamusoro-resolution zvimiro zvinhu nekudzora kubviswa kwezvinhu zvepasi1.
Iyo yakakodzera laser yekumisikidza nzira yekugadzira yakadai periodic pamusoro zvimiro yakananga laser interference shaping (DLIP).DLIP yakavakirwa padhuze-pameso kukanganiswa kwemaviri kana anopfuura laser matanda kuti aumbe mapatani enzvimbo ane hunhu mune micrometer uye nanometer renji.Zvichienderana nehuwandu uye polarization yemalaser matanda, DLIP inogona kugadzira uye kugadzira akasiyana siyana e topographic pamusoro pezvimiro.Nzira inovimbisa ndeyekubatanidza DLIP zvimiro nelaser-induced periodic surface structures (LIPSS) kuti igadzire pamusoro pepamusoro pepamusoro nehupamhi hwemaitiro akaoma8,9,10,11,12.Muzvisikwa, idzi hierarchies dzakaratidzwa kuti dzinopa kunyange zvirinani kuita pane imwe-scale modhi13.
Basa reLIPSS riri pasi pekuzvisimudzira (positive mhinduro) zvichibva pakuwedzera kuri pedyo-kwepamusoro modulation yemwaranzi intensity kugovera.Izvi zvinokonzerwa nekuwedzera kwe nanoroughness sezvo nhamba yelaser pulses inoshandiswa inowedzera 14, 15, 16. Modulation inoitika zvakanyanya nekuda kwekuvhiringidza kwemhepo yakasvibiswa nemagetsi emagetsi emagetsi15,17,18,19,20,21 of refracted and akaparadzirwa masaisai zvikamu kana pamusoro plasmons.Kuumbwa kweLIPSS kunobatwawo nenguva yemapulses22,23.Kunyanya, avhareji epakati laser masimba akakosha kune yakakwira chibereko chepamusoro kurapwa.Izvi zvinowanzoda kushandiswa kwemazinga akakwirira ekudzokorora, kureva muhuwandu hweMHz.Nokudaro, nguva yenguva pakati pe laser pulses ipfupi, iyo inotungamirira kune kupisa kuunganidza migumisiro 23, 24, 25, 26. Izvi zvinotungamirira kune kuwedzera kwese kwekushisa kwepamusoro, izvo zvinogona kukanganisa zvakanyanya maitiro ekugadzirisa panguva ye laser ablation.
Mune rimwe basa rakapfuura, Rudenko et al.uye Tzibidis et al.Imwe nzira yekuumbwa kwezvivakwa zve convective inokurukurwa, iyo inofanirwa kuwedzera kukosha sezvo kupisa kunowedzera19,27.Mukuwedzera, Bauer et al.Rongedza huwandu hwakakomba hwekupisa kuunganidzwa ne micron pamusoro pezvimiro.Pasinei neiyi thermally induced chimiro chekugadzira maitiro, zvinotendwa kuti kugadzirwa kwemaitiro kunogona kuvandudzwa nekuwedzera chiyero chekudzokorora28.Kunyangwe izvi, zvakare, hazvigone kuwanikwa pasina kuwedzera kukuru kwekuchengetedza kupisa.Naizvozvo, nzira dzekugadzirisa dzinopa multilevel topology inogona kusatakurika kune yakakwirira yedzokororo mazinga pasina kushandura maitiro kinetics uye chimiro formation9,12.Panyaya iyi, zvakakosha kuti tiongorore kuti tembiricha ye substrate inobata sei iyo DLIP yekugadzira maitiro, kunyanya kana ichiita akaturikidzana epamusoro mapatani nekuda kwekuumbwa panguva imwe chete yeLIPSS.
Chinangwa chechidzidzo ichi chaive chekuongorora mhedzisiro yekushisa kwe substrate pane inozobuda pamusoro petopography panguva yeDLIP yekugadzirisa simbi isina tsvina uchishandisa ps pulses.Munguva yekugadziriswa kwelaser, tembiricha yesample substrate yakaunzwa kusvika 250 \(^\circ\)C uchishandisa ndiro yekudziya.Izvo zvinokonzeresa zvimiro zvepasi zvakaratidzwa uchishandisa confocal microscopy, scanning electron microscopy, uye simba-inoparadzira X-ray spectroscopy.
Muchikamu chekutanga chekuedza, substrate yesimbi yakagadziriswa uchishandisa maviri-beam DLIP configuration ine nzvimbo ye 4.5 µm uye substrate tembiricha ye \ (T_{\ mathrm {s}}\) 21 \ (^ {\ circ }\)C, yakazonzi "isina kupisa" pamusoro.Muchiitiko ichi, pulse overlap \ (o_{\ mathrm {p}}\) ndiyo nhambwe iri pakati pemapurusi maviri sebasa rehukuru hwemavara.Inosiyana kubva ku99.0% (100 pulses pachinzvimbo) kusvika 99.67% (300 pulses pachinzvimbo).Muzviitiko zvose, peak simba density \ (\ Phi _\ mathrm {p}\) = 0.5 J / cm \ (^ 2 \) (yeGaussian yakaenzana pasina kupindira) uye kudzokorora f = 200 kHz yakashandiswa.Nhungamiro yepolarization ye laser beam inofananidzwa nekufamba kwetafura yekumisikidza (Fig. 1a)), iyo inofananidzwa negwara reiyo mutsara geometry yakagadzirwa nemaviri-matanda ekupindira maitiro.Mifananidzo inomiririra yezvivakwa zvakawanikwa uchishandisa scanning electron microscope (SEM) inoratidzwa muFig.1a–c.Kuti utsigire kuongororwa kwemifananidzo yeSEM maererano nepamusoro penzvimbo, Fourier anoshandura (FFTs, anoratidzwa mumaseti erima) akaitwa pane zvivakwa zviri kuongororwa.Muzviitiko zvese, mhedzisiro yeDLIP geometry yaionekwa nenguva ye 4.5 µm.
Kune iyo kesi \(o_{\mathrm {p}}\) = 99.0% munzvimbo ine rima yeFig.1a, inoenderana nenzvimbo yekupindira kwepamusoro, munhu anogona kuona grooves ine madiki akafanana maumbirwo.Ivo vanochinjana nemabhendi akajeka akafukidzwa mune nanoparticle-senge topography.Nekuti chimiro chakafanana pakati pemagirovhosi chinoratidzika kunge chiri perpendicular kune polarization yelaser beam uye ine nguva ye \(\Lambda _{\mathrm {LSFL-I}}\) 418\(\pm 65\) nm, zvishoma. isingasviki yewavelength yelaser \(\lambda\) (532 nm) inogona kunzi LIPSS ine low spatial frequency (LSFL-I)15,18.LSFL-Ini inogadzira inonzi s-type chiratidzo muFFT, "s" kuparadzira15,20.Nokudaro, chiratidzo chacho chiri perpendicular kune yakasimba central vertical element, iyo inogadzirwa neDLIP chimiro (\(\Lambda _{\mathrm {DLIP}}\) \(\ approx\) 4.5 µm).Chiratidzo chinogadzirwa nemutsara chimiro cheDLIP pateni muFFT chifananidzo chinodaidzwa kuti "DLIP-mhando".
SEM mifananidzo yezvimiro zvepasi zvakagadzirwa uchishandisa DLIP.Peak simba density \(\ Phi _\mathrm {p}\) = 0.5 J/cm\(^2\) (nokuda kweGaussian isina ruzha yakaenzana) uye chiyero chekudzokorora f = 200 kHz.Iyo mifananidzo inoratidza sampuli tembiricha, polarization uye overlay.Kufamba kwechikamu chenzvimbo inoiswa museve mutema mu (a).Iyo dema inset inoratidza inoenderana FFT yakawanikwa kubva ku37.25\(\nguva\)37.25 µm SEM mufananidzo (inoratidzwa kusvika wavevector yava \(\vec {k}\cdot (2\pi)^ {-1}\) = 200 nm).Iyo maitiro parameters inoratidzwa mumufananidzo wega wega.
Uchitarisa mberi muMufananidzo 1, unogona kuona kuti sezvo \ (o_{\ mathrm {p}}\) inopindirana inowedzera, sigmoid sigmoid inonyanya kutarisana ne-x-axis yeFFT.Imwe yese yeLSFL-Ini inoita kunge yakafanana.Mukuwedzera, simba rakaenzana rechiratidzo che-s-type rakaderera uye simba rechiratidzo cheDLIP-type rakawedzera.Izvi zvinokonzerwa nekuwedzera kutaurwa kwemigero nekuwedzera kupindirana.Zvakare, iyo x-axis siginecha pakati pemhando s nepakati inofanira kubva pachimiro chine hunhu hwakafanana neLSFL-I asi ine nguva yakareba (\(\Lambda _\mathrm {b}\) \(\ approx \ ) 1.4 ± 0.2 µm) sezvinoratidzwa mumufananidzo 1c).Nokudaro, zvinofungidzirwa kuti kuumbwa kwavo muenzaniso wemakomba ari pakati pegoronga.Iyo nyowani ficha inoonekwawo mune yakakwirira frequency renji (hombe wavenumber) yeiyo ordinate.Chiratidzo chinouya kubva kumakwikwi akafanana pamateru egoronga, zvichida nekuda kwekuvhiringidza kwechiitiko uye chiedza chinotaridzirwa mberi pamateru9,14.Mune zvinotevera, ma ripples aya anoratidzwa neLSFL \ (_ \ mathrm {edge} \), uye zviratidzo zvavo - nemhando -s \ (_ {\ mathrm {p)) \).
Muchiyedzo chinotevera, tembiricha yemuenzaniso yakaunzwa kusvika ku250 ° C pasi peinonzi "yakapisa" pamusoro.Kuronga kwakaitwa maererano nemaitiro akafanana ekugadzirisa sekuedzwa kwakataurwa muchikamu chekare (Figs. 1a-1c).Mifananidzo yeSEM inoratidza mhedzisiro yenzvimbo sezvakaratidzwa mumufananidzo 1d-f.Kupisa sampuli kusvika ku250 C kunotungamirira kukuwedzera kwekuonekwa kweLSFL, iyo nzira iyo inofanana nelaser polarization.Izvi zvimiro zvinogona kuratidzwa seLSFL-II uye zvine nguva yepakati \(\Lambda _\mathrm {LSFL-II}\) ye247 ± 35 nm.Iyo LSFL-II chiratidzo haina kuratidzwa muFFT nekuda kweiyo yakakwira mode frequency.Sezvo \ (o_{\ mathrm {p}} \) yakawedzera kubva 99.0 kusvika 99.67 \ (\%\) (Fig. 1d-e), hupamhi hwenharaunda yebhendi inopenya yakawedzera, iyo yakatungamirira pakuonekwa kwechiratidzo cheDLIP. kweanopfuura ma frequency epamusoro.wavenumbers (yakaderera frequencies) uye nekudaro chinja wakananga pakati peFFT.Mitsara yemakomba muFig. 1d inogona kunge iri precursors yezvinonzi grooves yakagadzirwa perpendicular kuLSFL-I22,27.Mukuwedzera, LSFL-II inoratidzika kunge yakapfupika uye isina kuumbwa.Ziva zvakare kuti avhareji saizi yemabhandi akajeka ane nanograin morphology idiki mune iyi kesi.Pamusoro pezvo, kugovaniswa kwehukuru hweaya nanoparticles kwakave kushoma kuparadzirwa (kana kutungamirwa kune kushoma particle agglomeration) pane pasina kupisa.Paunhu, izvi zvinogona kuongororwa nekuenzanisa manhamba 1a, d kana b, e, zvichiteerana.
Sezvo kupindirana \ (o_{\ mathrm {p}}\) kwakawedzera kusvika 99.67% (Fig. 1f), chimiro chakasiyana-siyana chakabuda zvishoma nezvishoma nekuda kwemiforo yairamba ichionekwa.Zvisineyi, magirovhosi aya anoita seasina kurongeka uye akadzikama pane mumufananidzo 1c.Musiyano wakaderera pakati pechiedza nenzvimbo dzakasviba dzemufananidzo unoratidza mumhando.Migumisiro iyi inotsigirwa zvakare nechiratidzo chisina simba uye chakapararira cheFFT ordinate muFig. 1f ichienzaniswa neFFT pa c.Madiki striae aionekwawo pakudziya kana tichienzanisa Figure 1b uye e, iyo yakazosimbiswa ne confocal microscopy.
Pamusoro peyeyedzo yapfuura, iyo polarization yelaser beam yakatenderedzwa ne90 \(^{\ circ}\), izvo zvakaita kuti polarization direction ifambe perpendicular kune positioning platform.Pamusoro pemuonde.2a-c inoratidza matanho ekutanga ekuumbwa kwechimiro, \(o_{\ mathrm {p}}\) = 99.0% mune isina kupisa (a), inopisa (b) uye inopisa 90\(^{\ circ }\ ) - Nyaya ine polarization inotenderera (c).Kuti uone nanotopography yezvivakwa, nzvimbo dzine mavara ane mavara anoratidzwa muFig.2d, pamwero wakawedzerwa.
SEM mifananidzo yezvimiro zvepasi zvakagadzirwa uchishandisa DLIP.Maitiro ekugadzirisa maitiro akafanana neFig.1.Mufananidzo unoratidza tembiricha yemuenzaniso \(T_s\), polarization uye pulse overlap \(o_\mathrm {p}\).Iyo dema inset zvakare inoratidza inoenderana neFourier shanduko.Mifananidzo iri mu(d)-(i) makuriro enzvimbo dzine maki mu(a)-(c).
Muchiitiko ichi, zvinogona kuonekwa kuti zvivako munzvimbo dzakasviba dzeFig. 2b, c dzine polarization sensitive uye saka dzinonzi LSFL-II14, 20, 29, 30. Zvinonyanya kukosha, kutaridzika kweLSFL-I kunotendererawo ( Fig. 2g, i), iyo inogona kuonekwa kubva pakatarisa chiratidzo che-s-mhando muFFT inoenderana.Iyo bandwidth yenguva yeLSFL-I inotaridzika yakakura kana ichienzaniswa nenguva b, uye huwandu hwayo hunochinjirwa kune madiki madiki muFig.Saka, inotevera LSFL nzvimbo yenguva inogona kucherechedzwa pane sampuli pane dzakasiyana tembiricha yekupisa: \(\Lambda _{\mathrm {LSFL-I}}}\) = 418\(\pm 65\) nm pa21 ^{\circ }\ )C (Fig. 2a), \(\Lambda _{\mathrm {LSFL-I}}\) = 445\(~\pm\) 67 nm uye \(\Lambda _{\mathrm {LSFL-II) }} \) = 247 ± 35 nm pa 250 ° C (Fig. 2b) ye s polarization.Zvakasiyana, nguva yepakati yep-polarization uye 250 \(^{\ circ }\)C yakaenzana ne \(\Lambda _{\mathrm {LSFL-I)))\) = 390\(\pm 55\ ) nm uye \(\ Lambda_{\mathrm{LSFL-II}}\) = 265±35 nm (Fig. 2c).
Zvinonzwisisika, mhedzisiro inoratidza kuti nekuwedzera tembiricha yemuenzaniso, iyo morphology yepamusoro inogona kushandura pakati pezviviri zvakanyanyisa, kusanganisira (i) nzvimbo ine chete LSFL-I zvinhu uye (ii) nzvimbo yakafukidzwa neLSFL-II.Nekuda kwekuti kuumbwa kweiyi rudzi rweLIPSS pamasimbi anosanganisirwa nepamusoro oxide layer, simba rekuparadzira X-ray kuongororwa (EDX) yakaitwa.Tafura 1 inopfupisa zvawanikwa.Kutsunga kwega kwega kunoitwa neavhareji inokwana mana spectra munzvimbo dzakasiyana pamusoro peiyo yakagadziridzwa sampuli.Zviyero zvinoitwa pamatembiricha akasiyana siyana \(T_\mathrm{s}\) uye nzvimbo dzakasiyana dzesample nzvimbo ine nzvimbo dzisina kurongeka kana dzakarongwa.Izvo zviyero zvinewo ruzivo nezve yakadzika unoxidized layers inorara yakananga pazasi penzvimbo yakanyungudutswa yakanyungudutswa, asi mukati mekudzika kwe electron penetration ye EDX kuongororwa.Nekudaro, zvinofanirwa kucherechedzwa kuti iyo EDX inogumira mukukwanisa kwayo kuyera iyo okisijeni yemukati, saka izvi zvakakosha pano zvinogona kungopa hunhu hwekuongorora.
Zvikamu zvisina kubatwa zvemasampuli hazvina kuratidza huwandu hunokosha hweokisijeni pamatembiricha ese ekushanda.Mushure mekurapa kwelaser, mazinga eokisijeni akawedzera muzviitiko zvese31.Musiyano wekuumbwa kwekutanga pakati pemasamples maviri asina kubatwa waive sezvaitarisirwa kune ekutengesa simbi masampuli, uye yakanyanya kukwirira kabhoni kukosha kwakawanikwa zvichienzaniswa neanogadzira data sheet yeAISI 304 simbi nekuda kwekusvibiswa kwehydrocarbon32.
Tisati takurukura zvingangove zvikonzero zvekudzikira kwekudzika kwegroove ablation uye shanduko kubva kuLSFL-I kuenda kuLSFL-II, simba spectral density (PSD) uye urefu profiles zvinoshandiswa.
(i) The quasi-two-dimensional normalized power spectral density (Q2D-PSD) yepamusoro inoratidzwa seSEM mifananidzo muFigure 1 uye 2. 1 uye 2. Sezvo PSD iri yakajairika, kuderera kwehuwandu hwechiratidzo kunofanira kuva inonzwisiswa sekuwedzera kwechikamu chinogara chiripo (k \(\le\) 0.7 µm\(^{-1}\), isina kuratidzwa), kureva kutsetseka.(ii) Zvinoenderana zvinoreva kureba kwepamusoro.Sample tembiricha \(T_s\), inopindirana \(o_{\mathrm {p}}\), uye laser polarization E inoenderana neinomisikidzwa \(\vec {v}\) yekumisikidza kwepuratifomu mafambiro inoratidzwa mune zvese zvirongwa.
Kuyera ratidziro yemifananidzo yeSEM, avhareji yakajairwa simba spectrum yakagadzirwa kubva pamifananidzo mitatu yeSEM yega yega paramende yakaiswa neavhareji yese one-dimensional (1D) simba spectral densities (PSDs) mu x kana y gwara.Girafu inoenderana inoratidzwa muFig. 3i inoratidza kushanduka kwemaitiro echiratidzo uye mupiro wayo wehukama kune spectrum.
Pamusoro pemuonde.3ia, c, e, peak yeDLIP inokura pedyo \(k_{\mathrm {DLIP}}~=~2\pi\) (4.5 µm)\(^{-1}\) = 1.4 µm \ ( ^{- 1}\) kana anowirirana epamusoro maharmonics sezvo kupindirana kunowedzera \(o_{\mathrm {p))\).Kuwedzera kweiyo yakakosha amplitude kwakabatana nekusimudzira kwakasimba kweiyo LRIB chimiro.Iyo amplitude yeakakwira harmonics inowedzera nekudzika kwemateru.Kune rectangular mabasa seanoganhura makesi, kufungidzira kunoda huwandu hukuru hwema frequency.Naizvozvo, iyo yepamusoro yakatenderedza 1.4 µm\(^{-1}\) muPSD uye inoenderana harmonics inogona kushandiswa semhando yemhando yechimiro chegorofu.
Pane zvinopesana, sezvakaratidzwa muFig. 3 (i) b, d, f, iyo PSD yemuenzaniso unopisa inoratidza nhongonya dzisina kusimba uye dzakafara dzine chiratidzo chidiki mune inowirirana harmonics.Mukuwedzera, mumuonde.3 (i) f inoratidza kuti chechipiri harmonic chiratidzo chinotopfuura chiratidzo chakakosha.Izvi zvinoratidza izvo zvisingaite uye zvisinganyanyi kutaurwa DLIP chimiro cheanopisa sampuli (ichienzaniswa ne \(T_s\) = 21\(^\circ\)C).Chimwe chinhu ndechekuti sezvo kupindirana \ (o_{\ mathrm {p}}\) kunowedzera, iyo inokonzeresa LSFL-I siginecha inotama yakananga kune diki wavenumber (yakareba nguva).Izvi zvinogona kutsanangurwa nekuwedzera kukwira kwemicheto yeDLIP modhi uye yakabatana nekuwedzera kwenzvimbo mukona yechiitiko14,33.Kutevera maitiro aya, kuwedzera kweiyo LSFL-I chiratidzo kunogona zvakare kutsanangurwa.Pamusoro pemateru, kune zvakare nzvimbo dzakati sandara pazasi uye pamusoro pema crests eiyo DLIP chimiro, ichibvumira huwandu hwakawanda hweLSFL-I nguva.Kune zvinhu zvinonyudza zvakanyanya, nguva yeLSFL-I inowanzofungidzirwa se:
apo \(\ theta\) ndiyo kona yezviitiko, uye zvinyorwa s uye p zvinoreva polarizations dzakasiyana33.
Zvinofanira kucherechedzwa kuti ndege yezviitiko zvekugadzirisa DLIP inowanzoenderana nekufamba kwenzvimbo yekumisikidza, sezvakaratidzwa muMufananidzo 4 (ona Chikamu Chekushandisa uye Nzira).Nokudaro, s-polarization, sekutonga, inofananidzwa nekufamba kwechikwata, uye p-polarization inotarisana nayo.Maererano ne equation.(1), ye-s-polarization, kupararira uye kuchinjika kweLSFL-I chiratidzo kune madiki mafungu nhamba inotarisirwa.Izvi zvinokonzerwa nekuwedzera kwe \ (\ theta \) uye mutsara weangular \ (\ theta \ pm \ delta \ theta \) sezvo kudzika kwemugero kunowedzera.Izvi zvinogona kuonekwa nekuenzanisa mapeaks eLSFL-I muFig. 3ia,c,e.
Maererano nemigumisiro inoratidzwa mufig.1c, LSFL\(_\mathrm {edge}\) inoonekwawo mune inoenderana PSD mufig.3ie.Pamusoro pemuonde.3ig, h inoratidza iyo PSD yep-polarization.Musiyano wepamusoro weDLIP unonyanya kutaurwa pakati peanopisa uye asina kupisa samples.Muchiitiko ichi, chiratidzo chinobva kuLSFL-I chinopindirana nepamusoro maharmonics epamusoro peDLIP peak, ichiwedzera kune chiratidzo padyo nelasing wavelength.
Kuti tikurukure mhedzisiro yacho zvakadzama, muFig. 3ii inoratidza kudzika kwechimiro uye kupindirana pakati pemapurusi eDLIP linear urefu kugovera pakudziya kwakasiyana.Iyo yakatwasuka kureba chimiro chepamusoro yakawanikwa neavhareji gumi ega ega ega ega epamusoro maprofiles akatenderedza pakati peiyo DLIP chimiro.Kune yega yega tembiricha yakashandiswa, kudzika kwechimiro kunowedzera nekuwedzera pulse overlap.Iyo mbiri yemuenzaniso wakapisa inoratidza magrooves ane peak-to-peak (pvp) kukosha kwe0.87 µm ye s-polarization uye 1.06 µm ye-p-polarization.Kusiyana neizvi, s-polarization uye p-polarization yemuenzaniso usina kupisa unoratidza pvp ye1.75 µm uye 2.33 µm, zvichiteerana.Iyo inoenderana pvp inoratidzwa muhurefu mbiri mufig.3ii.Imwe neimwe PvP avhareji inoverengerwa neavhareji sere single PvPs.
Mukuwedzera, mumuonde.3iig, h inoratidza p-polarization kureba kugovera perpendicular kune yekumisikidza system uye groove kufamba.Nzira yep-polarization ine simba rakanaka pakudzika kwegorofu sezvo ichikonzera pvp yakakwirira zvishoma pa 2.33 µm kana ichienzaniswa ne-s-polarization pa 1.75 µm pvp.Izvi zvinoenderana nemagrooves uye kufamba kweiyo positioning platform system.Izvi zvinogona kukonzerwa nechimiro chiduku munyaya ye-s-polarization inofananidzwa nechiitiko chep-polarization (ona Fig. 2f, h), iyo ichakurukurwa zvakare muchikamu chinotevera.
Chinangwa chehurukuro ndechekutsanangura kuderera kwekudzika kwegorofu nekuda kwekuchinja kwekirasi huru yeLIPS (LSFL-I kusvika LSFL-II) munyaya yekupisa sampuli.Saka pindura mibvunzo inotevera:
Kuti upindure mubvunzo wekutanga, zvakakosha kufunga nezve nzira dzinokonzera kuderedzwa kwekubvisa.Kune imwechete pulse pane yakajairika chiitiko, kudzika kweablation kunogona kutsanangurwa se:
uko \(\ delta _{\mathrm {E}}\) ndiko kudzika kwesimba rekupinda, \(\Phi\) uye \(\Phi _{\mathrm {th}}\) ndiko kunyura uye kutsetsenura kweAblation. chikumbaridzo, zvichiteerana34.
Pamasvomhu, kudzika kwesimba rekupinda kune simba rekuwedzera pane kudzika kwekubvisa, nepo shanduko yesimba ine logarithmic athari.Saka kushanduka kwe fluence hakuna kukanganisa \(\ Delta z\) chero bedzi \(\ Phi ~\gg ~\Phi _{\mathrm {th}}\).Nekudaro, yakasimba oxidation (semuenzaniso, nekuda kwekuumbwa kwechromium oxide) inotungamirira kune yakasimba Cr-O35 zvisungo zvichienzaniswa neCr-Cr zvisungo, nekudaro zvichiwedzera chikumbaridzo chekubvisa.Nekuda kweizvozvo, \(\ Phi ~\gg ~\Phi _{\mathrm {th}}\) haichagutsikane, izvo zvinotungamira kukurumidza kuderera kwekudzika kweablation nekuderera kwesimba rekuyerera kwesimba.Mukuwedzera, kuwirirana pakati peiyo oxidation state uye nguva yeLSFL-II inozivikanwa, iyo inogona kutsanangurwa nekuchinja mune nanostructure pachayo uye optical properties yepasi inokonzerwa nepamusoro oxidation30,35.Nokudaro, kugoverwa kwepamusoro kwepamusoro kwekutora fluence \ (\ Phi\) kunokonzerwa nekugadzirisa kwakaoma kwekubatana pakati penguva yekugadzira uye kukora kweiyo oxide layer.Zvichienderana nenguva, iyo nanostructure inobata zvakasimba kugoverwa kwemhepo yakanyungudutswa yemagetsi nekuda kwekuwedzera kwakanyanya mumunda, kufara kwema plasmons epamusoro, kushamisa kwechiedza chekufambisa kana kupararira17,19,20,21.Naizvozvo, \(\ Phi\) yakasimba inhomogeneous padhuze nepamusoro, uye \(\ delta _ {E}\) pamwe haichagoneki neabsorption coefficient imwe \(\ alpha = \delta _{\mathrm {opt} }} ^ { -1} \approx \delta _{\mathrm {E}}^{-1}\) yevhoriyamu yese iri pedyo-pamusoro.Sezvo kukora kweiyo oxide firimu kunonyanya kuenderana nenguva yekusimbisa [26], iyo nomenclature mhedzisiro inoenderana nesample tembiricha.Iyo optical micrographs inoratidzwa muFigure S1 mune Supplementary Material inoratidza shanduko mune yekuona zvinhu.
Izvi zvinokonzeresa zvishoma zvinotsanangura kudzika kwemugero kudzika kwezvimiro zvidiki zvepasi muFigure 1d,e uye 2b,c uye 3(ii)b,d,f.
LSFL-II inozivikanwa kuumba pane semiconductors, dielectrics, uye zvinhu zvinowanzoitika kune oxidation14,29,30,36,37.Muchiitiko chekupedzisira, ukobvu hwepamusoro oxide layer inonyanya kukosha30.Ongororo yeEDX yakaitwa yakaratidza kuumbwa kwemaokisi epamusoro pane yakarongeka.Saka, kune sampuli dzisina kupisa, ambient okisijeni inoita seinobatsira mukuumbwa kwechikamu chegasi uye zvishoma kuumbwa kwemaokisi epasi.Zviitiko zviviri izvi zvinopa mupiro wakakura pakuita uku.Kusiyana neizvi, kune inopisa samples, simbi oxides dzakasiyana oxidation inoti (SiO\(_{\mathrm {2}}\), Cr\(_{\mathrm {n}} \)O\(_{\mathrm { m}}\ ), Fe\(_{\mathrm {n}\)O\(_{\mathrm {m}}\), NiO, zvichingodaro) zviri pachena 38 mukufarira.Kuwedzera kune inodiwa oxide layer, kuvapo kwe subwavelength roughness, kunyanya yakakwirira spatial frequency LIPSS (HSFL), inofanirwa kuumba inodiwa subwavelength (d-type) intensity modes14,30.Yekupedzisira LSFL-II intensity mode ibasa reHSFL amplitude uye oxide ukobvu.Chikonzero cheiyi modhi ndeyekure-munda kupindira kwechiedza chakapararira neHSFL uye chiedza chakadzoserwa muzvinhu uye kuparadzira mukati mepamusoro dielectric material20,29,30.SEM mifananidzo yemupendero wepamusoro peteni muFigure S2 muSupplementary Materials chikamu chinoratidza HSFL yakagara iripo.Iyi nharaunda yekunze inobatwa zvisina simba neiyo periphery yekusimba kugovera, iyo inobvumira kuumbwa kweHSFL.Nekuda kweiyo symmetry yekusimba kwekugovera, chiitiko ichi chinoitikawo pamwe nekutarisa nzira.
Sampuli yekudziya inokanganisa iyo LSFL-II yekugadzira maitiro munzira dzinoverengeka.Kune rumwe rutivi, kuwedzera kwekushisa kwemuenzaniso \(T_\mathrm{s}\) kune simba guru pane chiyero chekusimbisa uye kutonhora kudarika kukora kweganda rakanyungudutswa26.Saka, iyo yemvura inotaridzika yemuenzaniso unopisa inoratidzwa kune ambient oxygen kwenguva yakareba.Uye zvakare, kunonoka kusimba kunobvumira kuvandudzwa kweakaomesesa convective maitiro anowedzera kusanganiswa kweokisijeni nemaokisi nesimbi yesimbi26.Izvi zvinogona kuratidzwa nekuenzanisa kukora kweiyo oxide layer inoumbwa chete nekupararira (\(\Lambda _\mathrm {diff}=\sqrt{D~\times ~t_\mathrm {s}}~\le ~15\) nm) Nguva yekubatanidza inoenderana \(t_\mathrm {s}~\le ~200\) ns, uye diffusion coefficient \(D~\le\) 10\(^{-5}\) cm\(^ 2 \ )/ s) Hukuru hwepamusoro hwakaonekwa kana hunodiwa muLSFL-II kuumbwa30.Kune rumwe rutivi, kupisa kunokanganisawo kuumbwa kweHSFL uye nokudaro zvinhu zvinoparadzira zvinodiwa kuti uchinje muLSFL-II d-type intensity mode.Kuratidzwa kwenanovoids yakavharirwa pasi pepamusoro inoratidza kubatanidzwa kwavo mukuumbwa kweHSFL39.Izvi zvinokanganisa zvinogona kumiririra mabviro emagetsi eHSFL nekuda kweinodiwa yakakwirira frequency periodic intensity mapatani14,17,19,29.Mukuwedzera, idzi dzakagadzirwa intensity modes dzakanyanya kufanana nenhamba huru ye nanovoids19.Nokudaro, chikonzero chekuwedzera kwechiitiko cheHSFL chinogona kutsanangurwa nekuchinja kwemasimba ekristal defects sezvo \(T_\mathrm{s}\) inowedzera.
Yakave ichangobva kuratidzwa kuti kutonhora kwesilicon ndiyo yakakosha parameter ye intrinsic interstitial supersaturation uye nekudaro pakuunganidza kwekuremara kwepoindi nekugadzirwa kwe dislocations40,41.Molecular dynamics simulations yesimbi dzakachena dzakaratidza kuti vacancies supersaturate panguva yekukurumidza recrystallization, uye nekudaro kuunganidzwa kwezvinzvimbo musimbi kunoenderera nenzira yakafanana42,43,44.Pamusoro pezvo, zvichangobva kuongororwa zvidzidzo zvesirivheri zvakatarisa pamaitiro ekuumbwa kwevoids uye masumbu nekuda kwekuunganidzwa kwemapoinzi defects45.Nokudaro, kuwedzera kwekushisa kwemuenzaniso \(T_\mathrm {s}\) uye, naizvozvo, kuderera kwehuwandu hwekutonhora kunogona kukanganisa kuumbwa kwevoids, iyo ndiyo nuclei yeHSFL.
Kana vacancies ari anodiwa precursors kune cavities uye saka HSFL, sampuli tembiricha \(T_s\) inofanira kuva nemigumisiro miviri.Kune rimwe divi, \(T_s\) inokanganisa mwero wekristalllization uye, nekudaro, kuwanda kwemapoinzi defects (vacancy concentration) mune yakakura crystal.Kune rimwe divi, zvinokanganisawo kutonhora kweyero mushure mekusimba, nekudaro zvichikanganisa kupararira kwemapoinzi akaremara mukristaro 40,41.Mukuwedzera, chiyero chekusimbisa chinoenderana nekristallographic orientation uye saka yakanyanya anisotropic, sezvakaita kupararira kwemapoinzi defects42,43.Zvinoenderana nechimiro ichi, nekuda kweanisotropic mhinduro yechinhu, kupindirana kwechiedza uye nyaya inova anisotropic, iyo inozosimudzira iyi deterministic periodic kusunungurwa kwesimba.Kune polycrystalline zvinhu, hunhu uhu hunogona kudzikiswa nehukuru hwezviyo imwe.Muchokwadi, kuumbwa kweLIPSS kwakaratidzwa zvichienderana nekutarisa zviyo46,47.Nokudaro, mhedzisiro yekushisa kwemuenzaniso \(T_s\) pachiyero chekristalllization inogona kunge isina kusimba semhedzisiro yezviyo.Nokudaro, iyo yakasiyana-siyana yecrystallographic orientation yezviyo zvakasiyana inopa tsanangudzo inogona kuitika yekuwedzera kwevoids uye kuunganidza kweHSFL kana LSFL-II, maererano.
Kuti ijekese zviratidzo zvekutanga zvekufungidzira uku, masampuli mambishi akaiswa kuratidza kuumbwa kwezviyo pedyo nechepamusoro.Kuenzanisa kwezviyo mufig.S3 inoratidzwa mune yekuwedzera zvinhu.Mukuwedzera, LSFL-I uye LSFL-II yakaonekwa mumapoka pamasampuli akapisa.Saizi uye geometry yemasumbu aya zvinoenderana nehukuru hwezviyo.
Zvakare, HSFL inongoitika muchikamu chakamanikana pane yakaderera flux densities nekuda kweiyo convective mavambo19,29,48.Naizvozvo, mukuyedza, izvi zvinogona kuitika chete padivi peiyo beam profile.Naizvozvo, HSFL yakaumbwa pane isina-oxidized kana isina kusimba oxidized nzvimbo, iyo yakave pachena pakuenzanisa zvikamu zveooxide zveakarapwa uye asina kurapwa samples (ona tafura reftab: muenzaniso).Izvi zvinosimbisa fungidziro yekuti iyo oxide layer inonyanya kukonzereswa nelaser.
Tichifunga kuti kuumbwa kweLIPSS kunowanzo kutsamira pahuwandu hwemapurusi nekuda kweiyo inter-pulse mhinduro, maHSFL anogona kutsiviwa nezvimiro zvakakura sezvo pulse overlap ichiwedzera19.Iyo shoma yenguva dzose HSFL inoguma mune isingawanzo kusimba pateni (d-mode) inodiwa pakuumbwa kweLSFL-II.Nokudaro, sezvo kupindirana kwe \ (o_\ mathrm {p}\) kunowedzera (ona Fig. 1 kubva de), nguva dzose yeLSFL-II inoderera.
Ichi chidzidzo chakaongorora mashandiro eiyo substrate tembiricha pamusoro pe morphology yelaser yakarongeka DLIP yakabatwa simbi isina tsvina.Zvakaonekwa kuti kupisa substrate kubva 21 kusvika 250 ° C kunotungamirira kuderera kwekudzika kwekubvisa kubva 1.75 kusvika 0.87 µm mu s-polarization uye kubva 2.33 kusvika 1.06 µm mu p-polarization.Kudzikira uku kunokonzerwa nekushandurwa kweLIPSS mhando kubva kuLSFL-I kuenda kuLSFL-II, iyo inosanganiswa nelaser-induced surface oxide layer pane yakakwira sampuli tembiricha.Mukuwedzera, LSFL-II inogona kuwedzera chikumbaridzo flux nekuda kwekuwedzera oxidation.Zvinofungidzirwa kuti mune ino tekinoroji system ine yakakwira pulse overlap, avhareji simba density uye avhareji yekudzokorora mwero, kuitika kweLSFL-II kunotemerwawo nekushandurwa kweiyo dislocation dynamics inokonzerwa nemuenzaniso kupisa.Iko kuunganidzwa kweLSFL-II inofungidzirwa kuve nekuda kwezviyo-inotenderera-inotsamira nanovoid kuumbwa, inotungamira kuHSFL seyakatangira kuLSFL-II.Mukuwedzera, pesvedzero yekutungamira kwepolarization pane yemaitiro nguva uye bandwidth yenguva yemaitiro inodzidzwa.Zvinoitika kuti p-polarization inoshanda zvakanyanya kune iyo DLIP maitiro maererano nekudzika kwekubvisa.Pakazere, chidzidzo ichi chinofumura seti yemaparamendi ekugadzirisa uye kukwidziridza kudzika kweDLIP ablation kugadzira akagadziridzwa epamusoro mapatani.Chekupedzisira, shanduko kubva kuLSFL-I kuenda kuLSFL-II inotyairwa zvachose uye kuwedzera kudiki kwekudzokorora kunotarisirwa nekuramba kupindirana kwepulse nekuda kwekuwedzera kupisa buildup24.Zvese izvi zvinhu zvine chekuita nedambudziko riri kuuya rekuwedzera maitiro eDLIP, semuenzaniso kuburikidza nekushandiswa kwepolygonal scanning system49.Kuti uderedze kuwanda kwekupisa, zano rinotevera rinogona kuteverwa: chengetedza kumhanya kwepolygonal scanner zvakakwirira sezvinobvira, uchitora mukana weiyo yakakura laser spot size, orthogonal kune iyo scanning direction, uye kushandisa optimal ablation.fluence 28. Pamusoro peizvi, pfungwa idzi dzinobvumira kusikwa kweiyo yakaoma hierarchical topography ye advanced surface functionalization uchishandisa DLIP.
Muchidzidzo ichi, electropolished Stainless steel plates (X5CrNi18-10, 1.4301, AISI 304) 0.8 mm gobvu yakashandiswa.Kuti abvise chero zvakasvibiswa kubva pamusoro, sampuli dzakanyatsoshambidzwa ne ethanol pamberi pelaser kurapwa (absolute concentration ye ethanol \ (\ ge \) 99.9%).
Kugadziriswa kweDLIP kunoratidzwa muMufananidzo 4. Mienzaniso yakagadzirwa uchishandisa DLIP system yakagadzirirwa 12 ps ultrashort pulsed laser source ine wavelength ye532 nm uye chiyero chekudzokorora che50 MHz.Kugoverwa kwenzvimbo kwesimba resimbi ndeye Gaussian.Yakanyanya kugadzirwa optics inopa mbiri-beam interferometric kumisikidza kugadzira mitsetse zvimiro pane sampuli.Lenzi ine kureba kwe100 mm inosimudza maviri ekuwedzera matanda elaser pamusoro pakona yakatarwa ye6.8\(^\circ\), iyo inopa nguva yenzvimbo ingangoita 4.5 µm.Ruzivo rwakawanda pamusoro pekumisikidzwa kwekuedza runogona kuwanikwa kumwe kunhu50.
Pamberi pekugadzirisa laser, sampu inoiswa pandiro yekudziya pane imwe tembiricha.Tembiricha yekudziya ndiro yakaiswa pa21 uye 250 ° C.Mune zvese zviedzo, jeti inochinjika yemhepo yakamanikidzwa yakashandiswa pamwe chete nemudziyo wekupopotera kudzivirira kuiswa kweguruva pameso.Iyo x, y nhanho system inomisikidzwa kumisikidza sampuli panguva yekugadzira.
Iko kumhanya kweiyo yekumisikidza nhanho system kwakasiyana kubva pa66 kusvika 200 mm / s kuwana kupindirana pakati pemapulisi e99.0 kusvika 99.67 \(\%\) zvichiteerana.Muzviitiko zvose, chiyero chekudzokorora chakagadziriswa pa 200 kHz, uye simba revhareji raiva 4 W, iro rakapa simba pamhepo ye20 μJ.Iyo dhayamita yakashandiswa mukuedza kweDLIP ingangoita 100 µm, uye inokonzeresa peak laser simba density ndeye 0.5 J/cm\(^{2}\).Iro simba rose rakaburitswa pane imwe nzvimbo yeyuniti ndiyo peak cumulative fluence inoenderana ne50 J/cm\(^2\) ye\(o_{\mathrm {p}}\) = 99.0 \(\%\), 100 J/cm \(^2\) ye \(o_{\mathrm {p))\)=99.5\(\%\) uye 150 J/cm\(^2\) ye\(o_{\mathrm {p}}\) ) = 99.67 \(\%\).Shandisa \(\lambda\)/2 ndiro kushandura polarization yelaser beam.Kune imwe neimwe seti yemaparamendi anoshandiswa, nzvimbo inosvika makumi matatu neshanu × 5 mm \(^{2}\) yakanyorwa pane sampuli.Yese yakarongeka miedzo yakaitwa pasi pemamiriro ekunze kuti ive nechokwadi chekushanda kwemaindasitiri.
The morphology yemasamples akaongororwa pachishandiswa confocal maikorosikopu ine 50x magnification uye optical uye vertical resolution ye170 nm uye 3 nm, zvichiteerana.Iyo yakaunganidzwa topographic data yakazoongororwa pachishandiswa pamusoro pekuongorora software.Bvisa maprofayiri kubva kune data renzvimbo zvinoenderana ne ISO 1661051.
Mienzaniso iyi yakaonekwa zvakare uchishandisa scanning electron maikorosikopu pane inomhanyisa voltage ye6.0 kV.Kuumbwa kwekemikari pamusoro pemasamples kwakaongororwa uchishandisa simba-dispersive X-ray spectroscopy (EDS) yekunamatira pamhepo inomhanya ye15 kV.Mukuwedzera, microscope yemaziso ine chinangwa che50x yakashandiswa kuona granular morphology ye microstructure yemasampuli. Izvi zvisati zvaitika, masampuli akaiswa pane imwe nguva tembiricha ye50 \ (^\ circ\) C kwemaminitsi mashanu musimbi isina tsvina ine hydrochloric acid uye nitric acid ye15-20 \(\%\) uye 1\( -<\)5 \(\%\), zvichiteerana. Izvi zvisati zvaitika, masampuli akaiswa pane imwe nguva tembiricha ye50 \ (^\ circ\) C kwemaminitsi mashanu musimbi isina tsvina ine hydrochloric acid uye nitric acid ye15-20 \(\%\) uye 1\( -<\)5 \(\%\), zvichiteerana. Перед этим образцы травили при постоянной температуре 50 \(^\circ\)С в течение пяти минут в краске из нержавеюной температуре 50 \(^\circ\) в течение пяти минут в краске из нержавеюной температуре 15-20 \(\%\) uye 1\( -<\)5 \( \%\) соответственно. Izvi zvisati zvaitika, masampuli akaiswa pane imwe nguva tembiricha ye50 \(^\ circ\) C kwemaminitsi mashanu mupende yesimbi isina tsvina ine hydrochloric uye nitric acids ine huwandu hwe15-20 \(\%\) uye 1\( -<\)5 \( \%\) zvichiteerana.在此之前，樣品在不锈钢染色液中以50 \(^\circ\)C 的恒温蚀刻五分钟，盐酸和硝酸浓度為\%\5 -20 \(1) \(1) -20 (\%\), 分别。在此之前，樣品在不锈钢染色液中以50 \(^\circ\)C (\%\)，分别.Izvi zvisati zvaitika, sampuli dzaive dzakabikwa kwemaminitsi mashanu pane imwe nguva tembiricha ye50 \ (^\ circ \) C mune yakasvibiswa mhinduro yesimbi isina tsvina ine huwandu hwehydrochloric uye nitric acids 15-20 \ (\%\) uye 1. \.(-<\)5 \ (\%\) соответственно. (-<\)5 \ (\%\) zvichiteerana.
Schematic dhizaini yekumisikidza yekumisikidzwa kweaviri-beam DLIP setup, kusanganisira (1) laser danda, (2) \(\lambda\)/2 ndiro, (3) DLIP musoro ine imwe yekuona gadziriso, (4) ) ndiro inopisa, (5) cross-fluidic , (6) x,y nhanho dzekumisa uye (7) simbi isina tsvina.Matanda maviri akaturikidzana, akatenderedzwa mutsvuku kuruboshwe, anogadzira zvimiro zvemitsetse pane sampuli pa \ (2 \ theta \) angles (kusanganisira ese s- uye p-polarization).
Iwo madhata akashandiswa uye/kana akaongororwa muchidzidzo chazvino anowanikwa kubva kuvanyori vakasiyana pakukumbira zvine musoro.
Nguva yekutumira: Jan-07-2023